Dual-axis MEMS inclinometer

Turck has introduced a dual-axis inclinometer sensor for angular tilt detection. This sensor features a compact rectangular housing and may be mounted at ±10, ±45, ±60 and ±85° angles. Inclinometer sensors may be used in a wide variety of industries to solve unique feedback requirements where the customer needs to level platforms or control tilt angle.

The Turck inclinometer measures angular tilt in reference to gravity. At the heart of the inclinometer is a MEMS (micro-electromechanical system) device, which incorporates a micro-electromechanical capacitive element into the sensor that utilises two parallel plate electrodes, one stationary and one attached to a spring-mass system. Movement causes acceleration that produces deflection in the non-stationary electrode. This results in a measurable change in the capacitance between the two plates that is proportional to the angle of deflection. These signals are conditioned to provide two analog outputs (0.1-4.9 VDC) or two current outputs (4-20 mA).

The microboard design in the MEMS technology allows for a compact, precise inclinometer in a robust, industrialised package. The inclinometer is IP67 rated, with a temperature range of -30 to 70 °C that permits its use in many applications, including machine engineering (levers, pedals, flaps, mixing machines, hydraulic jacks); commercial machines (diggers, cranes, rotary tables, bulldozers, road construction machinery); vertical and horizontal drills used in tunnel and road construction and immersion equipment; offshore plants (platforms and cranes) and conveyors.