Aerotech QNP-XY piezo nanopositioners

The Aerotech QNP-XY piezo nanopositioner stages provide the highest resonant frequency and stiffness of positioners with comparable size and travel, according to the company. This allows users to achieve higher throughput in exacting processes.

With resolution to 0.15 nm, linearity to 0.007% and repeatability to 2 nm, the stages meet the most demanding requirements of applications from microscopy to optics alignment. They are offered in travel ranges from 100 to 600 µm.

QNP piezo stages are guided by frictionless precision flexures that are optimised using finite element analysis for fast closed-loop response. The integrated XY package minimises stack height and moving mass, resulting in better static and dynamic multi-axis performance.

When coupled with Aerotech’s Q-series controllers and drives, the stages demonstrate subnanometre positioning resolution and in-position stability, and high-positioning bandwidth. They are available with or without capacitance sensor feedback and a wide range of software options.