Aerotech PlanarDLA XY linear motor stages

Aerotech has introduced a series of integrated open-frame stages with precise geometric performance and micrometre-level straightness. The PlanarDLA stages include high-precision roller bearings, precision-machined surfaces and non-contact linear motors that drive through the axes’ centre of stiffness. These features result in straightness to ±0.5µm and flatness to ±1.25µm.

The low-profile stages are designed for a wide range of applications from highly dynamic two-sided LED wafer processing to quasi-static optical metrology. There are nine models in the series to accommodate user requirements for travel and accuracy.

The PlanarDLA enables high throughput and high accuracy processing with 2 m/s velocities and 2g acceleration. It achieves high servo bandwidths while maximising the clear aperture available and keeping the overall height to a minimum.

Aerotech’s proprietary direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life. The stages are available with one or two motors per axis allowing optimisation of each axis for the specific application and process.