GE RPS 8000 and DPS 8000 resonant silicon pressure sensors

GE’s trench etched resonant pressure (TERPS) technology is available in a range of pressure sensors from GE Energy, Measurement & Control. The RPS 8000 and the DPS 8000 resonant silicon pressure sensors are claimed to offer accuracy and stability greater by a factor of 10 over existing piezoresistive pressure sensors and to significantly extend the pressure range capability conventionally associated with resonating pressure technology (RPT) sensors. Typical applications range from aerospace to subsea and from process engineering and metrology to industrial instrumentation.

The RPS 8000 and DPS 8000 sensors feature the inherent features of resonant silicon, but with greater pressure range (up to 70 bar), temperature range (-40 to +85°C) and better mechanical packaging.

The TERPS sensors operate in essentially the same way as an RPT sensor. The silicon structure is driven into resonance by the application of an electrostatic field and when pressure is applied to a diaphragm, the silicon resonator is stretched, changing the frequency, much like a guitar string. This change in frequency relates directly to the applied pressure. The RPS 8000 and the DPS 8000 sensors differ only in their respective outputs. The DPS 8000 incorporates an integral microprocessor and RS485/RS232 outputs to provide direct digital output. The RPS 8000 delivers a TTL frequency output and an mV temperature measurement from an integral temperature diode. These can be combined in a customer’s digital equipment to provide a pressure reading. The RPS 8000 is suitable for OEMs and systems developers who wish to incorporate high-accuracy, stable pressure measurement.